Microelectronic technologies - (5 cfu)

Prof. Giovanna Sozzi Tel. 0521 906044 - Fax. 0521 905822
  E-mail. giovanna.sozzi@unipr.it
  Home page. https://sites.google.com/site/giovannasozzi/home


Finalità

The course provides elementary notions about the manufacturing technologies for VLSI integrated circuits.

Programma

Preparation of Si wafers.
Generalities about planar silicon processing.
Photolithography.
Oxidation.
Doping by diffusion or by ion implantation.
Chemical vapor deposition, epitaxial growth.
Wet and dry etching.
Interconnects and metallizations.
Packaging problems.

Attività d'esercitazione

Preparation of Si wafers.
Generalities about planar silicon processing.
Photolithography.
Oxidation.
Doping by diffusion or by ion implantation.
Chemical vapor deposition, epitaxial growth.
Wet and dry etching.
Interconnects and metallizations.
Packaging problems.

Modalità d'esame

Oral discussion

Testi consigliati

S.M. SZE: " VLSI Technology ", McGraw-Hill, 1988
G. SONCINI: " Tecnologie Microelettroniche ", Boringhieri, 1986
M. BORGARINO, F. FANTINI: “Microelettronica”, Pitagora Editore, Bologna


Ultimo aggiornamento: 27-07-2006


Chiudi la finestra