( english version )
Microelectronic technologies ( 5 CFU )
Prof. Carlo Morandi
     Tel. 0521.905823 - Fax. 0521 905822           E-mail. carlo.morandi@unipr.it           Home page. http://ee.unipr.it/~morandi/

Finalità
The course provides elementary notions about the manufacturing technologies for VLSI integrated circuits.

Programma
Preparation of Si wafers.
Generalities about planar silicon processing.
Photolithography.
Oxidation.
Doping by diffusion or by ion implantation.
Chemical vapor deposition, epitaxial growth.
Wet and dry etching.
Interconnects and metallizations.
Packaging problems.

Attività d'esercitazione
Preparation of Si wafers.
Generalities about planar silicon processing.
Photolithography.
Oxidation.
Doping by diffusion or by ion implantation.
Chemical vapor deposition, epitaxial growth.
Wet and dry etching.
Interconnects and metallizations.
Packaging problems.

Modalità d'esame
Oral discussion


Testi consigliati
S.M. SZE: " VLSI Technology ", McGraw-Hill, 1988
G. SONCINI: " Tecnologie Microelettroniche ", Boringhieri, 1986
M. BORGARINO, F. FANTINI: “Microelettronica”, Pitagora Editore, Bologna

 
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