( english version )
Tecnologie microelettroniche ( 5 CFU )
Prof. Giovanna Sozzi
     Tel. 0521 906044 - Fax. 0521 905822           E-mail. giovanna.sozzi@unipr.it           Home page. https://sites.google.com/site/giovannasozzi/home

Finalità
The course provides elementary notions about the manufacturing technologies for VLSI integrated circuits and the main compound semiconductor devices.

Programma
-Preparation of Si wafers.
-Generalities about planar silicon processing.
-Photolithography.
-Oxidation.
-Doping by diffusion or by ion implantation.
-Chemical vapor deposition, epitaxial growth.
-Wet and dry etching.
-Interconnects and metallization.
-Packaging problems.
-Technology and principles of operation of some compound semiconductor devices.


Modalità d'esame
Oral discussion


Testi consigliati
S.M. SZE: " VLSI Technology ", McGraw-Hill, 1988
G. SONCINI: " Tecnologie Microelettroniche ", Boringhieri, 1986

 
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